Pumps – Motor driven – Electric or magnetic motor
Patent
1986-12-29
1988-03-29
Croyle, Carlton R.
Pumps
Motor driven
Electric or magnetic motor
417366, 415112, 415175, 277 53, 277 70, 277 71, 277 79, F04B 1700
Patent
active
047340185
ABSTRACT:
A vacuum pump with a seal structure for a pump unit of the vacuum pump and a driving mechanism for rotating a rotor in the pump stages of the pump is disclosed. The seal structure is provided with a narrow gap sealing arrangement formed by a stationary member which is opposed to the portion of a shaft of the driving mechanism which is between the pump unit and an upper bearing supporting the same shaft, which narrow gap sealing arrangement comprises first, second and third seal portions; a mechanism for supplying a discharge gas to the first seal portion; and a mechanism for supplying a purge gas to the second and third seal portions. Owing to these parts, the feed rate of the purge gas can be minimized, and the entry of the oil mist, which occurs during the lubrication of the bearing, into the interior of the pump unit can be prevented. This enables the interior of the pump unit to be kept clean.
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Mase Masahiro
Nagaoka Takashi
Taniyama Minoru
Croyle Carlton R.
Hitachi , Ltd.
Szczecina Jr. Eugene L.
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