Piezoelectric transducer

Details Piezoelectric transducer Piezoelectric transducer

1987-08-18

1989-02-07

Budd, Mark O.

Electrical generator or motor structure

Non-dynamoelectric

Piezoelectric elements and devices

310334, 310366, 310360, H01L 4108

Patent

active

048033928

ABSTRACT:
There is provided a piezoelectric transducer comprising a substrate having a single crystal plate comprising strontium titanate or magnesium oxide, a first electrode comprising metal films so formed on the substrate as to leave openings exposing the surface of the substrate, a piezoelectric thin film comprising lead titanate as the main component formed so as to cover the openings and the first electrode, and a second electrode formed on the piezoelectric thin film.

REFERENCES:
patent: 3688222 (1972-08-01), Lieberman
patent: 4117074 (1978-09-01), Tiersten et al.
patent: 4236095 (1980-11-01), Ono et al.
patent: 4484098 (1984-11-01), Cullen et al.
patent: 4511816 (1985-04-01), Mikoshiba et al.
patent: 4567393 (1986-01-01), Asai et al.

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