Waste gas exhaust system for vacuum process apparatus

Details Waste gas exhaust system for vacuum process apparatus Waste gas exhaust system for vacuum process apparatus

1985-03-21

1987-04-07

Spitzer, Robert

Gas separation

Means within gas stream for conducting concentrate to collector

55208, 55387, B01D 5304

Patent

active

046558004

ABSTRACT:
An exhaust system utilizes a booster pump and an auxiliary pump of vacuum process apparatus which vacuum treats a substrate with gases of the chlorine series. A vessel of the auxiliary pump on the air exhaust side is filled with an inert gas of a pressure higher than the atmospheric pressure, and a dry adsorption column capable of adsorbing the gases of the chlorine series is connected to an air exhaust pipe of the auxiliary pump. Further, a dust trap having a cooling surface is provided between the booster pump and the auxiliary pump, and the wall surface of the gas passage between the booster pump and the auxiliary pump is heated.

REFERENCES:
patent: 2333748 (1943-11-01), Sperry
patent: 3059396 (1962-10-01), Thees
patent: 3498025 (1970-03-01), Bednarski
patent: 3616611 (1971-11-01), Gentili
patent: 4088456 (1978-05-01), Giorgi et al.
patent: 4106918 (1978-08-01), Fujikawa et al.
patent: 4247519 (1981-01-01), Sano

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