Micro-displacement measuring apparatus using a semiconductor las

Details Micro-displacement measuring apparatus using a semiconductor las Micro-displacement measuring apparatus using a semiconductor las

1985-05-29

1987-04-07

Evans, F. L.

Optics: measuring and testing

By polarized light examination

With light attenuation

G01B 1100

Patent

active

046555978

ABSTRACT:
A micro-displacement measuring apparatus using a semiconductor laser, comprises a compound resonator system containing the semiconductor laser, and a light detector receiving the light from the semiconductor laser, and with the compound resonator system being constructed such that light from said laser irradiates an object to be measured and the reflected light therefrom returns to the semiconductor laser. The light detector detects and measures the number of fluctuations and the level of the optical output of the laser to determine the displacement of the object and of the direction of the displacement of the object, respectively.

REFERENCES:
patent: 3476483 (1969-11-01), Weeks
patent: 3514207 (1970-05-01), De Lang et al.

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