Method of forming an element isolating portion in a semiconducto

Details Method of forming an element isolating portion in a semiconducto Method of forming an element isolating portion in a semiconducto

1989-10-24

1991-10-22

Chaudhuri, Olik

Fishing, trapping, and vermin destroying

437238, 437 63, H01L 2176

Patent

active

050595504

ABSTRACT:
A method for manufacturing a semiconductor device comprising:

REFERENCES:
patent: 4239811 (1980-12-01), Kemlage
patent: 4700464 (1987-10-01), Okada et al.
patent: 4746625 (1988-05-01), Morita et al.
patent: 4845054 (1989-07-01), Mitchener
Wolf et al., Silicon Processing for the VLSI ERA, vol. 1, Lattice Press, Sunset Beach, CA (1986), p. 194.
P. C. Hunt et al., "Process HE: A Highly Advanced Trench Isolated Bipolar Technology for Analogue and Digital Applications", IEEE 1988 Custom Integrated Circuits Conference, pp. 22.2.1-22.2.4.

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