Fishing – trapping – and vermin destroying
Patent
1993-11-12
1995-10-03
Fourson, George
Fishing, trapping, and vermin destroying
437 83, 437925, 29 2501WB, H01L 2168, H01L 2148
Patent
active
054552010
DESCRIPTION:
BRIEF SUMMARY
TECHNICAL FIELD
This invention relates to a holding container useful in chemical treatments, processing, washing, transportation, storage and the like upon fabrication of one or more thin-layer semiconductor substrates, which are suitable for driving a planar display, by forming a thin-film semiconductor on each of the substrates.
BACKGROUND ART
The term "planar display" as used herein means those adapted to display an image by using a liquid crystal, plasma display tubes, light emitting diodes, electroluminescence or the like. Planar displays are used as thin television sets and various displays.
A glass plate, ceramic plate, porcelain-enameled steel plate or the like is used as a substrate. In order to form a semiconductor in the form of a thin film on the substrate so as to fabricate a thin-film semiconductor substrate suitable for use in driving a planar display, a variety of treatments such as various chemical treatments, masking, etching and washing are carried out. As materials of substrate-holding containers employed in such treatments, glass fiber containing polyphenylene sulfide resins (hereinafter abbreviated as "GF-containing PPS resins") and fluorine plastics such as perfluoroalkoxy-substituted polytetrafluoroethylene resin (hereinafter abbreviated as "PFA resin") have heretofore been used.
Liquid-crystal displays, one type of planar displays, are generally composed of two glass substrates, each of which is equipped with a transparent electrode attached thereon, and a liquid crystal layer having a thickness of several micrometers and interposed between the glass substrates. In order to form the transparent electrode on each of the glass substrate, treatments such as washing, masking and etching are conducted. The above-mentioned holding containers have also been used as glass substrate holding containers in such treatments.
A holding container made of a GF-containing PPS resin is however accompanied by drawbacks that the glass fibers in the resin are dissolved by an etching treatment, the resin and glass fiber are caused to separate as fine powder from the surface of the holding container and the fine powder deposits on the surface of the substrate to result in contamination of the substrate surface. Moreover, a holding container made of a fluorine plastic is accompanied by drawbacks that it is prone to a deformation due to its low stiffness, thereby involving a potential problem of accidental drop of substrates in the course of their treatments, and it cannot be used in any step involving heating due to its softening and deformation at elevated temperatures.
DISCLOSURE OF THE INVENTION
An object of this invention is to provide a holding container for a thin-film semiconductor substrate adapted to drive a planar display, which holding container gives off no fine powder compared with conventional holding containers, has excellent heat resistance and can contribute to the improvement of productivity in the fabrication of such thin-film semiconductor substrates.
The present invention relates to a holding container adapted to hold a thin-film semiconductor substrate suitable for use in driving a planar display, characterized in that the container is made of a polyether ether ketone resin.
BEST MODE FOR CARRYING OUT THE INVENTION
The polyether ether ketone resin useful in the practice of this invention is a crystalline thermoplastic aromatic resin having a recurring unit represented by the following formula (I): ##STR1##
In the present invention, it is preferable to use polyether ether ketone resins having a melt flow index in a range of 1-5 g/10 min as measured at 360.degree. C. and under a load of 2.16 Kg in accordance with ASTM D1238.
Other resins, fillers and/or fibrous reinforcing materials may also be incorporated in such small amounts so long as the object of the present invention is not impaired. The above-described polyether ether ketone resin may be molded or otherwise formed into holding containers of various shapes by a molding or forming technique known commonly in the art, s
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Gotoh Yoshihisa
Kawamata Motoo
Takahashi Toshiaki
Fourson George
Mitsui Toatsu Chemicals Inc.
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