Low loss, single-mode planar waveguide

Details Low loss, single-mode planar waveguide Low loss, single-mode planar waveguide

1983-04-01

1986-07-01

Buczinski, S.C.

350 9611, G02B 610

Patent

active

H00000779

ABSTRACT:
A low loss optical waveguide is provided by taking a silicon substrate with a silicon dioxide waveguide thereon and depositing lead on the air interface surface of the silicon dioxide. The lead is then oxidized and diffused into the silicon dioxide creating a high optical quality, high index region at the air interface of the waveguide. This allows transmitted waveguide light energy directed into the silicon dioxide to be transmitted in the lead oxide diffused portion of the waveguide, keeping the energy away from the lossy silicon substrate, and thereby providing a low loss planar waveguide.

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