Vapor rinse-vapor dry process tool

Details Vapor rinse-vapor dry process tool Vapor rinse-vapor dry process tool

1994-05-16

1995-10-03

Stinson, Frankie L.

Cleaning and liquid contact with solids

Apparatus

With heating, cooling or heat exchange means

134200, 134108, B08B 310

Patent

active

054543908

ABSTRACT:
A cleaning apparatus for cleaning chemically processed articles between chemical processing steps. The cleaning apparatus includes a sealable pressurization vessel. After a chemical process step, an article, such as a semiconductor wafer is placed in the vessel. The vessel is sealed. Vessel pressure is adjusted. Solvent in the vessel is heated to a boil forming a vapor. Solvent vapor is recondensed by a primary condensing coil. Condensed solvent rains onto the article, washing it. After the article is clean, it is dried when a secondary condensing coil condenses the solvent vapor, causing the distilled solvent to rain into and be collected by a collection tray. Collected solvent is channelled into a storage reservoir. The storage reservoir is sealed after all of the solvent is collected. The vessel is opened to remove the cleaned article.

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