Infrared microscope

Details Infrared microscope Infrared microscope

1998-12-28

2000-05-09

Font, Frank G.

Optics: measuring and testing

Infrared and ultraviolet

359371, G02B 2106

Patent

active

060611200

ABSTRACT:
When an operator causes an angle change, a rotation controller controls rotation of an aperture structure with an aperture. At the same time, a deviation amount calculator calculates a positional deviation change amount based on angles of the aperture relative to a sample through rotation and deviation parameters regarding a deviation between a rotation axis of the aperture and a center of the aperture. Then the deviation amount calculator sends the positional deviation change amount to a horizontal motion controller. The horizontal motion controller controls a sample stand driving means to move a sample stand in the X-axis and Y-axis direction corresponding to the positional deviation change amount. The position of a sample is automatically adjusted to keep a spot of the sample at the center of the aperture through angle adjustment.

REFERENCES:
patent: 5780853 (1998-07-01), Mori et al.

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