Conductive source line for high density programmable read-only m

Details Conductive source line for high density programmable read-only m Conductive source line for high density programmable read-only m

1991-07-10

1992-09-22

Thomas, Tom

Fishing, trapping, and vermin destroying

437 48, 437 52, 357 235, H01L 2170

Patent

active

051496658

ABSTRACT:
Disclosed is a process and structure for use with a Flash E.sup.2 PROM and EPROM. The inventive structure allows for positioning of the control gates over the active area in a manner which allows for more error in the process thereby increasing yields. The inventive structure has transistor diffusion areas which are self-aligned with the floating and control gates and avoids both a field oxide etch and a buried N

REFERENCES:
patent: 4590665 (1986-05-01), Owens et al.
patent: 4872041 (1989-10-01), Sugiura et al.
patent: 4892840 (1990-01-01), Esquivel et al.
patent: 4949309 (1990-08-01), Rao
patent: 5019527 (1991-05-01), Ohshima et al.
patent: 5047362 (1991-09-01), Bergemont

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