Apparatus and method for measuring a photometric characteristic

Optics: measuring and testing – By dispersed light spectroscopy – Utilizing a spectrophotometer

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356326, 356444, G01J 342, G01N 2127

Patent

active

047054034

ABSTRACT:
A photometric apparatus includes a light source, apparatus for oscillating a light beam spot across a sample, apparatus for measuring secondary light from the sample, and apparatus for determining the specific portion of the sample to be examined by photometry. With this photometric apparatus, each of a plurality of microscopic areas of the sample can be evaluated accurately.

REFERENCES:
patent: 4118781 (1978-10-01), Brezinski et al.
patent: 4150899 (1979-04-01), Nakamura
patent: 4549809 (1985-10-01), Minekane et al.

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