Method of storing trichlorosilane and silicon tetrachloride

Details Method of storing trichlorosilane and silicon tetrachloride Method of storing trichlorosilane and silicon tetrachloride

1998-05-01

2000-05-09

Thornton, Krisanne

Chemical apparatus and process disinfecting, deodorizing, preser

Process disinfecting, preserving, deodorizing, or sterilizing

Process of storage or protection

422 41, 423342, 423347, 423348, 423349, B01J 1900, C01B 3302

Patent

active

060600217

ABSTRACT:
Trichlorosilane for producing polycrystal silicon and tetrachlorosilane for producing trichlorosilane are storaged under hydrogen gas as a sealing gas. High-purity polycrystal silicon is provided.

REFERENCES:
patent: 3068078 (1962-12-01), Kersting
patent: 4092446 (1978-05-01), Padovani et al.
patent: 4213937 (1980-07-01), Padovani et al.
patent: 4340574 (1982-07-01), Coleman
patent: 5067989 (1991-11-01), Yokota et al.

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