Apparatus for vaporizing solid coating reactants

Coating apparatus – Gas or vapor deposition – Multizone chamber

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Details

118DIG5, 118718, 118724, C23C 1100, C23C 1312

Patent

active

042979714

ABSTRACT:
An apparatus is disclosed for fluidizing and vaporizing particulate solid coating reactants by first establishing a fluidized bed of dispersed particulate solid coating reactants and thereafter drawing a volume of fluidizing gas and suspended particulate solid coating reactant to a vaporizer while mixing an additional volume of gas therewith and then vaporizing the dispersed particulate solid coating reactant in the reactant-gas mixture. The reactant-gas mixture is then directed into contact with a hot substrate to be coated in order to deposit a film thereon.

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patent: 3786309 (1974-01-01), Miottel
patent: 3852098 (1974-12-01), Bloss et al.
patent: 3961600 (1976-06-01), Homer et al.
patent: 3970037 (1976-07-01), Sapko
patent: 4018185 (1977-04-01), Myers
patent: 4044717 (1977-08-01), Provost
patent: 4170074 (1979-10-01), Heckman

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