Radiation imagery chemistry: process – composition – or product th – Radiation modifying product or process of making – Radiation mask
Patent
1995-03-13
1996-08-27
Rosasco, S.
Radiation imagery chemistry: process, composition, or product th
Radiation modifying product or process of making
Radiation mask
430322, 430323, 430324, G03F 900
Patent
active
055499953
ABSTRACT:
A transmitting photomask includes an optically transparent substrate having a major surface on which a plurality of recesses are selectively formed and transmitting exposure light, a plurality of opaque materials formed on the portions of the major surface of the transparent substrate, other than the recesses and preventing the exposure light from passing therethrough, and a plurality of transmitting portions constituted of the recesses. Each of the recesses has side walls formed perpendicular to the major surface of the transparent substrate so as to substantially coincide with a corresponding end face of each of the opaque materials, and adjacent transmitting portions have different depths. A method of manufacturing a transmitting photomask, includes a step of forming an opaque film preventing exposure light from passing therethrough on an optically transparent substrate transmitting the exposure light, a step of forming a plurality of opening patterns for forming a transmitting portion on the opaque film and thus forming a plurality of opaque materials with remaining portions of the opaque film, and a step of forming a plurality of transmitting portions including recesses having different depths alternately by etching the transparent substrate through the opening patterns by use of anisotropic etching.
REFERENCES:
patent: 5384219 (1995-01-01), Dao et al
SPIE vol. 1927 Optical Laser Microlithography VI, pp.28-41; C. Pierrat et al. Mar. 1993.
J. Vac. Sci. Technol.B 10(6) pp.3055-3061; R. L. Kostelak et al. Nov/Dec 1992.
Inoue Soichi
Nakamura Hiroko
Tanaka Satoshi
Kabushiki Kaisha Toshiba
Rosasco S.
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