Alignment system and method with micromovement stage

Details Alignment system and method with micromovement stage Alignment system and method with micromovement stage

1976-04-05

1977-04-19

Dobeck, B.

Electricity: motive power systems

Positional servo systems

With particular 'error-detecting' means

318687, 248425, G05B 1918

Patent

active

040191095

ABSTRACT:
Alignment of a mask and a semiconductor wafer to be processed is effected by orthogonal and angular movements of the mask singly and in combination. A carrier for the mask is supported on four orthogonally positioned transducers which, when actuated to elongate or contract, produce carrier translational movement in either or both orthogonal directions and/or rotational movement by selective elongation and contraction of one or more transducers. Actuation of the transducers and the alignment are obtained by signals from a feedback system including photon detection and multiple frequency oscillation utilizing alignment marks on the mask and the wafer.

REFERENCES:
patent: 3037156 (1962-05-01), Koulikovitch
patent: 3429155 (1969-02-01), Hines
patent: 3457422 (1969-07-01), Rottmann
patent: 3466514 (1969-09-01), Brunner
patent: 3622856 (1971-11-01), Willis
patent: 3786332 (1974-01-01), Hepner et al.
patent: 3789285 (1974-01-01), Nishizawa
patent: 3843916 (1974-10-01), Trotel et al.
patent: 3904945 (1975-09-01), Hassan et al.
IBM Tech. Disc. Bull., vol. 15, No. 12, May 1973, pp. 3889 to 3890.
Aronstein et al., "Frictionless X, Y, Z and Theta Micropositioning Table."

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