Process for photo-assisted epitaxial growth using remote plasma

Details Process for photo-assisted epitaxial growth using remote plasma Process for photo-assisted epitaxial growth using remote plasma

1988-10-21

1990-04-17

Hearn, Brian E.

Fishing, trapping, and vermin destroying

148DIG29, 148DIG48, 148 332, 156613, 427 38, 437 88, 437170, 437173, H01L 2120, H01L 21306

Patent

active

049180282

ABSTRACT:
A process for forming deposited film, which comprises:

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