Method of preventing corrosion of aluminum alloys

Details Method of preventing corrosion of aluminum alloys Method of preventing corrosion of aluminum alloys

1991-10-30

1993-09-21

Maples, John S.

Fishing, trapping, and vermin destroying

437246, 156643, 156665, H01L 21465, C23F 100

Patent

active

052468887

ABSTRACT:
A method of preventing corrosion of aluminum alloys is disclosed, which comprises the steps of coating an aluminum alloy layer on a semiconductor substrate, forming a resist pattern on an aluminum alloy layer, dry etching the aluminum alloy with the resist pattern used as a mask and also using a chlorine-based gas, and subsequently carrying out a plasma process using a blend gas containing oxygen (O.sub.2) and ammonia (NH.sub.3) and a subsequent process of removing the resist using oxygen plasma. Even where there is not only aluminum alloy but an outer or inner layer of TiN, TiW, etc. to be etched, corrosion of the aluminum alloy can be prevented without etching the outer or inner layer at all and also without etching an inner insulating layer at all.

REFERENCES:
patent: 4267013 (1981-05-01), Iida et al.

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