Micromachined rate and acceleration sensor

Details Micromachined rate and acceleration sensor Micromachined rate and acceleration sensor

1992-01-21

1994-07-26

Chapman, John E.

Measuring and testing

Speed, velocity, or acceleration

Angular rate using gyroscopic or coriolis effect

73517AV, G01P 904

Patent

active

053318536

ABSTRACT:
A sensor (10) is disclosed for measuring the acceleration and angular rotation rate of a moving body and is micromachined from a silicon substrate (16). First and second accelerometers (32a and b) are micromachined from the silicon substrate (16), each having a force sensing axis (38) and producing an output signal of the acceleration of the moving body along its force sensing axis (38). The first and second accelerometers (32a and b) are mounted within the substrate (16) to be moved along a vibration axis (41). The first and second accelerometers (32a and b) are vibrated or dithered to increase the Coriolis component of the output signals from the first and second accelerometers (32a and b). A sinusoidal drive signal of a predetermined frequency is applied to a conductive path (92) disposed on each of the accelerometers. Further, magnetic flux is directed to cross each of the conductive paths (92), whereby the interaction of the magnetic flux and of the drive signal passing therethrough causes the desired dithering motion. A link (72) is formed within the silicon substrate (16) and connected to each of the accelerometers (32a and b), whereby motion imparted to one results in a like, but opposite motion applied to the other accelerometer (32). Further, a unitary magnet (20) and its associated flux path assembly direct and focus the magnetic flux through the first and second accelerometers (32a and b) formed within the silicon substrate (16).

REFERENCES:
patent: 2544646 (1951-03-01), Barnaby et al.
patent: 4372173 (1983-02-01), EerNisse et al.
patent: 4445376 (1984-05-01), Merhav
patent: 4467651 (1984-08-01), Peters et al.
patent: 4510802 (1985-04-01), Peters
patent: 4512192 (1985-04-01), Peters
patent: 4517841 (1985-05-01), Malametz et al.
patent: 4522062 (1985-06-01), Peters
patent: 4538461 (1985-09-01), Juptner et al.
patent: 4541105 (1985-09-01), Lee et al.
patent: 4590801 (1986-05-01), Merhav
patent: 4592233 (1986-06-01), Peters
patent: 4628735 (1986-12-01), Kirkpatrick
patent: 4654663 (1987-03-01), Alsenz et al.
patent: 4665748 (1987-05-01), Peters
patent: 4706259 (1987-11-01), Tonn et al.
patent: 4711128 (1987-12-01), Boura
patent: 4712426 (1987-12-01), Peters
patent: 4712427 (1987-12-01), Peters
patent: 4727752 (1988-03-01), Peters
patent: 4744248 (1988-05-01), Stewart
patent: 4750363 (1988-06-01), Norling
patent: 4750364 (1988-06-01), Kawamura et al.
patent: 4766768 (1988-08-01), Norling
patent: 4782700 (1988-11-01), Hulsing
patent: 4786861 (1988-11-01), Hulsing
patent: 4799385 (1989-01-01), Hulsing et al.
patent: 4810922 (1989-03-01), Hirsch
patent: 4811602 (1989-03-01), Hulsing
patent: 4814680 (1989-03-01), Hulsing
patent: 4821572 (1989-04-01), Hulsing
patent: 4841773 (1989-06-01), Stewart
patent: 4848156 (1989-07-01), Hulsing
patent: 4864861 (1989-09-01), Hulsing
patent: 4870588 (1989-09-01), Merhav
patent: 4872342 (1989-10-01), Hanson et al.
patent: 4872343 (1989-10-01), Peters
patent: 4879914 (1989-11-01), Norling
patent: 4881408 (1989-11-01), Hulsing et al.
patent: 4882933 (1989-11-01), Petersen et al.
patent: 4891982 (1990-01-01), Norling
patent: 4891984 (1990-01-01), Fujii et al.
patent: 4896268 (1990-01-01), MacGugan
patent: 4901586 (1990-02-01), Blake
patent: 4912990 (1990-04-01), Norling
patent: 4920801 (1990-05-01), Church
patent: 4922756 (1990-05-01), Henrion
patent: 4928203 (1990-05-01), Swindal et al.
patent: 4930351 (1990-06-01), Macy et al.
patent: 4996877 (1991-03-01), Stewart et al.
Albert P. Pisano, "Resonant-Structure Micromotors," Micro Electro Mechanical System, Feb. 20-22, 1989, IEEE Catalog No. 89TH0249-3, Library of Congress No. 88-83988. pp. 44-48.
William C. Tang, et al., "Laterally Driven Polysilicon Resonant Microstructures," Micro Electro Mechanical Systems, Feb. 20-22, 1989, IEEE Catalog No. 89TH0249-3, Library of Congress No. 88-83988 pp. 53-59.

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