Surface analyzing method and apparatus

Details Surface analyzing method and apparatus Surface analyzing method and apparatus

1990-05-02

1993-06-15

Hannaher, Constantine

Radiant energy

Invisible radiant energy responsive electric signalling

With means to inspect passive solid objects

378206, 2503591, 2504581, 2504591, 2504611, G01N 2300, G21K 500

Patent

active

052201694

ABSTRACT:
A first beam of light having a wavelength ranging from a soft X-ray to a vacuum ultraviolet region is focused into a thin beam of light and irradiated upon a surface of a specimen, and physical information obtained as a result of such irradiation is detected to obtain information of the surface of the specimen. A second beam of light is focused into a thin beam of light and irradiated at the irradiation spot of the first beam of light upon the surface of the specimen, and the position of the irradiation spot of the second beam of light on the surface of the specimen is visually observed to located the position of the irradiation point of the first beam of light on the surface of the specimen.

REFERENCES:
patent: 4521905 (1985-06-01), Hosokawa
patent: 4844617 (1989-07-01), Kelderman et al.
patent: 4969177 (1990-11-01), Otsuki et al.
`X-Ray Tri-Scope` Flier, Sep. 1949.

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