Piezoelectric crystalline films and method of preparing the same

Details Piezoelectric crystalline films and method of preparing the same Piezoelectric crystalline films and method of preparing the same

1978-02-02

1979-05-22

Cooper, Jack

Stock material or miscellaneous articles

Composite

Of quartz or glass

204192SP, 252 629, 427100, 428469, 428539, C23C 1500, C04B 3500

Patent

active

041560507

ABSTRACT:
Piezoelectric crystalline films which consist essentially of a crystalline zinc oxide film with a c-axis perpendicular to a substrate surface, containing 0.01 to 20.0 atomic percent of vanadium. These films are prepared by radio-frequency sputtering.

REFERENCES:
patent: 3766041 (1973-10-01), Wasa et al.
patent: 3988232 (1976-10-01), Wasa et al.
Hausmann et al., "Chem. Abstracts", vol. 72, 1970, 26902g.

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