Semiconductor wafer processing system

Details Semiconductor wafer processing system Semiconductor wafer processing system

1994-04-28

1996-08-13

Bennett, Henry A.

Drying and gas or vapor contact with solids

Apparatus

With apparatus using centrifugal force

414938, 414940, 414941, 414217, 414222, F26B 1724

Patent

active

055444210

ABSTRACT:
A processor for processing integrated circuit wafers, semiconductor substrates, data disks and similar units requiring very low contamination levels. The processor has an interface section which receives wafers in standard wafer carriers. The interface section transfers the wafers from carriers onto trays for processing. The interface unit can hold multiple groups of multiple trays. A conveyor having an automated arm assembly moves wafers supported on a tray. The conveyor moves the trays from the interface along a track to several processing stations. The processing stations are accessed from an enclosed area adjoining the interface section.

REFERENCES:
patent: 4431361 (1984-02-01), Bayne
patent: 4449885 (1984-05-01), Hertel et al.
patent: 4840530 (1989-06-01), Nguyen
patent: 5055036 (1991-10-01), Asano et al.
patent: 5125784 (1992-06-01), Asano
patent: 5232328 (1993-08-01), Owczarz et al.
patent: 5301700 (1994-04-01), Kamikawa et al.

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