Multiple crystal head for deposition thickness monitor

Details Multiple crystal head for deposition thickness monitor Multiple crystal head for deposition thickness monitor

1989-11-02

1991-06-25

Williams, Hezron E.

Measuring and testing

Vibration

Resonance, frequency, or amplitude study

118712, G01N 2904

Patent

active

050256645

ABSTRACT:
A multiple crystal head has aluminum rotary carousel within an aluminum body, and number of crystals disposed about the axis of the carousel. A water line coil is clamped to the aluminum body by a stainless steel clamp plate, and a beryllium copper finger spring provides thermal contact between the carousel and the body so that any heat from the deposition process is quickly removed by the water coil. A space is maintained between the front of the carousel and the proximal side of the body front face so that there is no scraping when the carousel rotates. A removable stainless steel heat shield over the body provides good thermal isolation and prevents deposits from reaching the aluminum body or other parts behind the shield. A pneumatic bellows and a pawl and ratchet assembly rotate the carousel to bring the various crystals into the active, monitoring position.

REFERENCES:
patent: 3383238 (1968-05-01), Unzicker et al.
patent: 3670693 (1972-06-01), Rorick et al.
patent: 4121537 (1978-10-01), Maruyama et al.
patent: 4362125 (1982-12-01), Schadler

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