Irradiated film

Details Irradiated film Irradiated film

1979-05-29

1981-08-11

Anderson, Bruce C.

Radiant energy

Irradiation of objects or material

Irradiation of semiconductor devices

H01J 3706

Patent

active

042836301

ABSTRACT:
Irradiated film having substantial uniformity in the radiation dosage profile is produced by irradiating the film within a trough having lateral deflection blocks disposed adjacent the film edges for deflecting electrons toward the surface of the trough bottom for further deflecting the electrons toward the film edge.

REFERENCES:
patent: 2785313 (1957-03-01), Trump
patent: 2993120 (1961-07-01), Emanuelson
patent: 4178220 (1979-12-01), Fowler

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