Piezoelectric vibrating element having a rectangular configurati

Electrical generator or motor structure – Non-dynamoelectric – Piezoelectric elements and devices

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310368, H01L 4108

Patent

active

045623724

ABSTRACT:
A vibrating element for the vibration under an expansion mode has a substrate made of a constant modulus alloy and has a rectangular configuration defined by opposite long sides and opposite short sides, a thin piezoelectric film deposited on the substrate, and a vibration electrode film deposited on the piezoelectric film. When an equivalent circuit of the vibrating element can be defined as including a resonance inductance L, a resistance R and a series capacitance Cs, which are connected in series and a parallel capacitance Cp, which is connected parallelly to the series connection of L, R and Cs, a ratio of short side to long side of the substrate is selected to have values around points where a ratio of parallel capacitance Cp to serial capacitance Cs shows negative peaks.

REFERENCES:
patent: 3209176 (1965-09-01), Paley
patent: 3634787 (1972-01-01), Newell
patent: 4469975 (1984-09-01), Nakamura

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