Semiconductor pressure converting device

Details Semiconductor pressure converting device Semiconductor pressure converting device

1989-08-11

1990-11-27

Woodiel, Donald O.

Measuring and testing

Fluid pressure gauge

Diaphragm

73727, 338 4, G01L 708, G01L 906

Patent

active

049727168

ABSTRACT:
A semiconductor pressure converting device including a fixing table joined to a silicon diaphragm consists of 2 structures superposed on each other, in which the longitudinal elastic modulus of the first fixing table is significantly different from the longitudinal elastic modulus of the semiconductor diaphragm. The first fixing table is highly insulating and the linear expansion coefficient thereof is approximately equal to the linear expansion coefficient of the semiconductor diaphragm. The second fixing table is made of a material having a longitudinal elastic modulus and a linear expansion coefficient approximately equal to those of the semiconductor diaphragm.

REFERENCES:
patent: 4321578 (1982-03-01), Nagasu et al.
patent: 4574640 (1986-03-01), Krechmery
patent: 4852408 (1989-08-01), Sanders

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