Piezoelectric vibrating element

Details Piezoelectric vibrating element Piezoelectric vibrating element

1984-12-24

1987-03-10

Budd, Mark O.

Electrical generator or motor structure

Non-dynamoelectric

Piezoelectric elements and devices

310312, 29 2535, H01L 4108

Patent

active

046493107

ABSTRACT:
A vibrating element for the vibration under an expansion mode has a substrate made of a constant modulus alloy having a plate shape which is symmetrical along a line extending across the substrate. At least one pair of projections extends from opposite sides of the substrate symmetrically with respect to the line. A thin piezoelectric film is deposited on the substrate, and a vibration electrode film is further deposited on the piezoelectric film. The pair of projections are provided to be trimmed to adjust the vibration frequency of the vibrating element.

REFERENCES:
patent: 3488530 (1970-01-01), Staudte
patent: 3634787 (1972-01-01), Newell
patent: 4037121 (1977-07-01), Nakamura et al.
patent: 4156156 (1979-05-01), Sweany et al.
patent: 4433264 (1984-02-01), Nishiyama et al.
patent: 4469975 (1984-09-01), Nakamura

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