Method of and apparatus for adsorbingly fixing a body

Details Method of and apparatus for adsorbingly fixing a body Method of and apparatus for adsorbingly fixing a body

1985-04-29

1985-12-31

Marbert, James B.

Handling: hand and hoist-line implements

Utilizing fluid pressure

Venturi effect

414737, B66C 102

Patent

active

045616884

ABSTRACT:
A method of and an apparatus for adsorbingly fixing a body, such as a photomask (mask) or a wafer to a chuck, effect a preliminary vacuum-adsorbing step of preventing the creation of internal stress due to the temperature change between the body and the chuck before the final vacuum adsorption is effected, or effect a preliminary vacuum releasing step for relieving the created internal stress.

REFERENCES:
patent: 3999795 (1976-12-01), Barker
patent: 4202623 (1980-05-01), Watkin
patent: 4256829 (1981-03-01), Daniel
patent: 4340234 (1982-07-01), Ise
patent: 4452577 (1984-06-01), Bouwknegt et al.

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