Electricity: measuring and testing – Measuring – testing – or sensing electricity – per se – With rotor
Patent
1990-05-14
1991-11-12
Wider, Kenneth A.
Electricity: measuring and testing
Measuring, testing, or sensing electricity, per se
With rotor
324158P, 33 1M, G01R 100, G01R 1067
Patent
active
050650920
ABSTRACT:
A system for determining probe tip alignment for a probe card having a plurality of probes downwardly extending in a defined region of the probe card. Each probe has a tip assigned to a precise X, Y position in a plane spaced from the probe card. The assigned X, Y position is dictated by the topology of the integrated circuit chip for which the probe card was designed. A first memory stores the assigned X, Y position for each of the tips, a second memory stores the measured location of the plane that each of the tips is found in, and a sensor measures the actual X, Y position of an individual probe tip. The sensor is moved to the measured plane at the assigned X, Y position for each tip and obtaining, for each tip, a meausred X, Y position. A computer then displays in a monitor by means of suitable icons, all probes which have a measured X, Y position within an acceptable window of the assigned X, Y position and then displays, with suitable icons, all probe tips having a measured X, Y position exceeding the window of acceptability.
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Probe Technology, Probilt 500 brochure, Wentworth Laboratories, Inc., Compass Model CMP-200 brochure.
Triple S Engineering, The Pacer Automatic Integrated Probe Analysis, Maintenance and Repair Station brochure.
Smith, Automating Probe Card Analysis and Maintenance, Microelectronic Manufacturing and Testing, Mar. 1990, pp. 33-34.
Burns William J.
Triple S Engineering, Inc.
Wider Kenneth A.
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