Electronic microvalve apparatus and fabrication

Details Electronic microvalve apparatus and fabrication Electronic microvalve apparatus and fabrication

1991-01-02

1993-01-19

Robinson, Ellis P.

Stock material or miscellaneous articles

Structurally defined web or sheet

Discontinuous or differential coating, impregnation or bond

428210, 428336, 428446, 428448, 428457, 428698, 428701, 25112901, B32B 1504

Patent

active

051806231

ABSTRACT:
An electronic microvalve design and fabrication process for a miniature gas valve. In this microvalve design an objective is to minimize the operating voltage of the valve and minimize the force necessary to close the valve and hold it tightly closed against high gas pressures. The microvalve is an integral structure made on one piece of silicon and is a flow through valve with inlet and outlet on opposite sides of the silicon wafer.

REFERENCES:
patent: 4545112 (1985-10-01), Holmberg et al.
patent: 4585209 (1986-04-01), Aine et al.
patent: 4821999 (1989-04-01), Ohtaka
patent: 4827323 (1989-05-01), Tegelaar et al.
patent: 5006487 (1991-04-01), Stokes
patent: 5036383 (1991-07-01), Mori
patent: 5060050 (1991-10-01), Tsuneoka et al.

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