Method for the contact-free testing of microcircuits or the like

Details Method for the contact-free testing of microcircuits or the like Method for the contact-free testing of microcircuits or the like

1983-06-06

1986-02-25

Levy, Stewart J.

Electricity: measuring and testing

Measuring, testing, or sensing electricity, per se

With rotor

324 51, 324 73PC, G01R 3102

Patent

active

045730083

ABSTRACT:
A method for the contactless testing of an object, particularly microcircuits, employs a particle beam probe to permit a resistance determination in a load-free fashion and without chronological variations of the charge state of the object. A first measuring spot is irradiated with a write beam of approximately a primary electron energy E.sub.PE =2E.sub.o, whereby E.sub.o is that particular energy at which the number of charges leaving the object is equal to the number of charges incident on the object. Then an additional measuring spot is checked as to whether it exhibits a conductive connection with the first measuring spot. The second measuring spot can be checked as to whether a specimen current is flowing. On the second measuring spot a read current of approximately a primary electron energy E.sub.PE =E.sub.o can be directed. The number of secondary electrons detected with a detector then serves the purpose of determining whether a conductive connection exists between the first measuring spot and the secondary measuring spot.

REFERENCES:
patent: 3531716 (1970-09-01), Tarui et al.
patent: 4415851 (1983-11-01), Langner et al.
patent: 4417203 (1983-11-01), Pfeiffer et al.
Vac. Sci. Technol., vol. 19, No. 4, Nov./Dec., 1981 by H. C. Pfeiffer et al., "Contactless Electrical Testing", p. 1016.

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