Method and device for measuring a surface contour

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364577, G01B 500

Patent

active

050419889

ABSTRACT:
A method and device for measuring the surface contour such as the surface roughness of a member to be measured having a curved surface shape. In the surface contour measuring device, a cubic curved line corresponding to the curved surface of the member to be measured is obtained from a measurement signal according to a method of least squares, and the cubic curved line is removed from the measurement signal to obtain a roughness curved line, so that, even when the member to be measured has a curved surface, the surface roughness of the member can be obtained with accuracy.

REFERENCES:
patent: 4807132 (1989-02-01), Lane et al.
Japanese Patent Publ. of Appln. 63-59444.
Japanese Patent Appl. Laid-open No. 51-105848.
Japanese Patent Publ. of Appln. 54-21271.
Japanese Patent Publ. of Appln. No. 54-26387.
Japanese Patent Appl. Laid-open No. 52-49859.

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