Metal working – Method of mechanical manufacture – Electrical device making
Patent
1983-10-19
1987-03-03
Niebling, John F.
Metal working
Method of mechanical manufacture
Electrical device making
2041922, 20419222, C23C 1434
Patent
active
046464298
ABSTRACT:
A main magnetic pole of a magnetic head for perpendicular magnetization is made in a sputtering apparatus by continuously moving a shielding plate closely to a substrate in a space between the substrate and a target electrode standing face to face with each other, whereby the thickness of a soft-magnetic metal film formed on the substrate by sputtering is continuously changed.
REFERENCES:
patent: 3117885 (1964-01-01), Pohm et al.
patent: 3751803 (1973-08-01), Fisher et al.
patent: 4303489 (1981-12-01), Morrison, Jr.
patent: 4436593 (1984-03-01), Osborne et al.
Fuji Photo Film Co. , Ltd.
Leader William T.
Niebling John F.
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