Coating processes – Electrical product produced – Integrated circuit – printed circuit – or circuit board
Patent
1989-10-31
1991-09-03
Pianalto, Bernard
Coating processes
Electrical product produced
Integrated circuit, printed circuit, or circuit board
20419232, 20419237, 427309, 427343, 4273762, 427399, B05D 306
Patent
active
050453459
ABSTRACT:
The coating of a substrate with a coating different from and non-reactive with the substrate is improved by energetic surface alloying of the substrate prior to coating. The ion implantation alters the stoichiometry of the substrate, creating a substrate surface which is reactive with the coating. For example, the bonding of TiN to Si.sub.3 N.sub.4 is enhanced by implanting the substrate surface with Ti.
REFERENCES:
patent: 4557037 (1985-12-01), Hanoha et al.
patent: 4615904 (1986-10-01), Ehrlich et al.
patent: 4849247 (1989-07-01), Scanlon et al.
Singer et al., "Composition and Structure of Si.sub.3 N.sub.4 Implanted w Ti' at 900C", Mat. Res. Soc. Symp. Proc, vol. 100, 1988 Materials Research Society.
Singer, "Surface Chemistry and Mechanical Behavior of Silicon Carbide and Silicon Nitride Implanted with Titanium to High Fluences and High Temperatures", Surface and Coatings Technology, 33 (1987), 487-499.
Singer et al., "High Temperature Lubrication of Ceramics by Surface Modification", Surface and Coatings Technology, 37 (1989), 179-192.
Singer et al., "Ion-Beam Alloying and Thermochemistry of Ceramics at High Temperatures", presented by NATO-ASI Conference on Structure-Property.
Edelberg Barry A.
McDonnell Thomas E.
Pianalto Bernard
The United States of America as represented by the Secretary of
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