Patent
1979-05-21
1980-05-06
Larkins, William D.
357 48, 357 89, 357 90, 357 92, H01L 2704
Patent
active
042020069
ABSTRACT:
A semiconductor integrated circuit device includes circuit elements having relatively different performance characteristics in which buried regions having different chemical elements are used to autodope an epitaxial layer to different degrees.
REFERENCES:
patent: 3759760 (1973-09-01), Encinas
patent: 3846192 (1974-11-01), Murrmann
patent: 3961340 (1976-06-01), Encinas
patent: 4087900 (1978-05-01), Yiannonlos
Sze, "Physics of Semiconductor Devices" (Wiley, N. Y., 1969) p. 31.
Christoffersen H.
Cohen D. S.
Larkins William D.
Magee T. H.
RCA Corporation
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