Zone plate alignment marks

Details Zone plate alignment marks Zone plate alignment marks

1976-04-02

1977-07-26

Corbin, John K.

Optics: measuring and testing

Refraction testing

Prism engaging specimen

250237G, 350162ZP, G01B 1126

Patent

active

040379698

ABSTRACT:
Certain classes of patterns, for example so-called zone plates, are utilized as alignment marks in the fabrication of integrated circuits. Such a plate, which functions as a lens, provides a high-brightness image that is relatively insensitive to any degradation of the pattern.

REFERENCES:
patent: 3545854 (1970-12-01), Olsson
patent: 3689162 (1972-09-01), Ferguson
patent: 3690881 (1972-09-01), King
patent: 3915576 (1975-10-01), Taylor

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