Zone heating for fluidized bed silane pyrolysis

Details Zone heating for fluidized bed silane pyrolysis Zone heating for fluidized bed silane pyrolysis

1985-07-30

1987-08-04

Doll, John

Chemistry of inorganic compounds

Silicon or compound thereof

Elemental silicon

427213, C01B 3302

Patent

active

046845135

ABSTRACT:
An improved heated fluidized bed reactor and method for the production of high purity polycrystalline silicon by silane pyrolysis wherein silicon seed particles are heated in an upper heating zone of the reactor and admixed with particles in a lower reaction zone, in which zone a silane-containing gas stream, having passed through a lower cooled gas distribution zone not conducive to silane pyrolysis, contacts the heated seed particles whereon the silane is heterogeneously reduced to silicon.

REFERENCES:
patent: 4207360 (1980-06-01), Padovani
patent: 4314525 (1982-02-01), Hsu et al.

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