ZnO/Si SAW Device having separate comb transducer

Details ZnO/Si SAW Device having separate comb transducer ZnO/Si SAW Device having separate comb transducer

1982-09-30

1984-03-13

Miller, J. D.

Electrical generator or motor structure

Non-dynamoelectric

Piezoelectric elements and devices

310313R, 333154, H01L 4104

Patent

active

044370318

ABSTRACT:
A separate comb transducer is disclosed in a ZnO/Si SAW device to enable doubling of the possible operating frequency for a given photolithographic capability of the device. Frequency doubling is made possible by a single-phase structure having conductive and non-conductive surfaces equal to one-half of the SAW wavelength. By connection of two such structures in parallel, a balanced separate comb transducer is achieved for reducing signal levels due to direct coupling that otherwise occurs in the single-phase structure. Separate comb grating transducers are also disclosed to enable fabrication of higher frequency MZOS convolvers, with both the separate comb transducer and separate comb grating transducer being shown utilized in both the Rayleigh and Sezawa modes.

REFERENCES:
patent: 3768032 (1973-10-01), Mitchell
patent: 3938062 (1976-02-01), Hopp
patent: 4117074 (1978-09-01), Tiersten et al.
patent: 4209725 (1980-06-01), Dieulesaint et al.

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