Zirconia disk substrate having high surface finish

Details Zirconia disk substrate having high surface finish Zirconia disk substrate having high surface finish

1997-08-15

1998-10-20

Speer, Timothy M.

Stock material or miscellaneous articles

Circular sheet or circular blank

428 653, 428220, 428407, 428694TR, 428702, B32B 300

Patent

active

058243860

ABSTRACT:
This invention relates to polishing YTZP zirconia disk substrates with colloidal silica to achieve a surface roughness Ra of no more than 8 angstroms.

REFERENCES:
patent: 4681813 (1987-07-01), Yamada
patent: 4738885 (1988-04-01), Matsumoto
patent: 5080948 (1992-01-01), Morita
patent: 5228886 (1993-07-01), Zipperian

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