Zirconia diaphragm structure and piezoelectric/electrostrictive

Details Zirconia diaphragm structure and piezoelectric/electrostrictive Zirconia diaphragm structure and piezoelectric/electrostrictive

1994-10-12

1996-05-14

Dougherty, Thomas M.

Electrical generator or motor structure

Non-dynamoelectric

Piezoelectric elements and devices

310324, 310328, H01L 4104

Patent

active

055170765

ABSTRACT:
A zirconia diaphragm structure, and a method of producing such structure. The zirconia diaphragm structure includes a zirconia substrate having at least one window, and a zirconia diaphragm plate formed integrally with the zirconia substrate so as to close each window, the zirconia substrate comprising a zirconia material as a major component, and containing 0.1-5.0% by weight of one of combinations consisting of (i) alumina and calcia, (ii) alumina, calcia and magnesia, (iii) alumina, calcia and silica, and (iv) alumina, calcia, magnesia and silica.

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patent: 5376856 (1994-12-01), Takeuchi et al.
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