Zirconia diaphragm structure and piezoelectric/electrostrictive

Details Zirconia diaphragm structure and piezoelectric/electrostrictive Zirconia diaphragm structure and piezoelectric/electrostrictive

1996-08-16

1999-12-21

Chen, Vivian

Stock material or miscellaneous articles

Two dimensionally sectional layer

Next to unitary web or sheet of equal or greater extent

428699, 264603, 264614, 264618, 264681, 156 89, 310324, 310328, 310345, 501103, 501104, 501105, B32B 1800

Patent

active

060046449

ABSTRACT:
A zirconia diaphragm structure, and a method of producing such structure in which the zirconia diaphragm structure includes a zirconia substrate having at least one window, and a zirconia diaphragm plate formed integrally with the zirconia substrate so as to close each window, the zirconia substrate comprising a zirconia material as a major component, and containing 0.1-3.0% by weight of alumina, 0.1-3.0% by weight of silica, 0.1-5.0% by weight of alumina and silica, 0.1-5.0% by weight of alumina and magnesia, or 0.1-5.0% by weight of alumina, silica and magnesia.

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