Zinc oxide thin film sensor having improved reducing gas sensiti

Details Zinc oxide thin film sensor having improved reducing gas sensiti Zinc oxide thin film sensor having improved reducing gas sensiti

1981-02-17

1982-11-16

Kreitman, Stephen A.

Measuring and testing

Gas analysis

Gas chromatography

G01N 2704

Patent

active

043589510

ABSTRACT:
In a preferred embodiment, the concentration of hydrogen or other reducing species in a gaseous sample is determined by measuring the electrical resistance of a zinc oxide thin film semiconductor having a gas-sensing surface exposed to the sample and carrying a thin spotted coating of a palladium-gold alloy. The palladium-gold alloy substantially improves the sensitivity of the resistance of the zinc oxide film to the presence of the reducing species.

REFERENCES:
patent: 3479257 (1969-11-01), Shaver
patent: 3865550 (1975-02-01), Bott et al.
patent: 4030340 (1977-06-01), Chang
N. Ichinose et al., "Ceramic Oxide Semiconductor Elements for Detecting Components", Ceramics, 11 (3), pp. 203-211, 1976.
T. Seiyama et al., "Study on a Detector for Gaseous Components Using Semiconductive Thin Films," Analytical Chemistry, Vol. 38, No. 8, pp. 1069-1073, Jul. 1966.

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