Zinc oxide sintered body, and preparation process and use thereo

Details Zinc oxide sintered body, and preparation process and use thereo Zinc oxide sintered body, and preparation process and use thereo

1992-03-02

1993-08-17

Bell, Mark L.

Compositions

Electrically conductive or emissive compositions

Metal compound containing

501 1, H01B 106

Patent

active

052366324

ABSTRACT:
An electroconductive zinc oxide sintered body composed of sintered particles fusion-bonded in the grain boundaries thereof; which has a sintered density of from 5 to 5.5 g/cm.sup.3 ; and which does not substantially contain closed cells isolated from the outside in the interior of the sintered body. The electroconductive zinc oxide sintered body is prepared by sintering a mixture of an oxide of an element having a positive valency of at least 3 and zinc oxide in the presence of water at a temperature of at least 1,300.degree. C. The electroconductive zinc oxide sintered body is used as a sputtering target for the preparation of a low resistance, transparent electroconductive film.

REFERENCES:
patent: 3538023 (1970-11-01), Bowman
patent: 4142996 (1979-03-01), Wong et al.
patent: 4767729 (1988-08-01), Osman et al.
patent: 4948529 (1990-08-01), Ritchie et al.
patent: 5026672 (1991-06-01), Bayard
patent: 5102650 (1992-04-01), Hayashi et al.

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