Zinc-diffused narrow stripe AlGaAs/GaAs double heterostructure l

Coherent light generators – Particular active media – Semiconductor

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357 17, 372 46, H01S 319

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045176744

ABSTRACT:
A zinc-diffused narrow stripe AlGaAs/GaAs double heterostructure laser device and a method of making the same. A double heterostructure layered structure including a p-type GaAs active layer sandwiched between two n-type AlGaAs confinement layers is formed on a substrate. A p-type zinc diffused stripe region having a U-shaped diffusion front extends longitudinally between two reflective surfaces located on respective ends of the device and extends vertically from the surface of the upper confinement layer down to at least the surface of intersection between the active layer and the lower confinement layer. In a method of forming the device, the various layers are formed by epitaxial growth or by metalorganic chemical vapor deposition. The stripe region is formed by diffusing zinc from a source through a slot in a diffusion mask. The zinc diffused into the device is driven in by heating the device in the absence of the zinc source.

REFERENCES:
patent: 4105955 (1978-08-01), Hayashi et al.
C. S. Hong et al., "W-Shaped Diffused Stripe (WDS) GaAsGaAlAs Double Hetetructure Lasers Grown by Metal-Organic Chemical Vapor Depositon", Digest of Papers, Topical Meeting on Integrated and Guided-Wave Optics, Jan. 6-8, 1982.
C. S. Hong et al., "High-Efficiency, Low-Threshold, Zn-Diffused Narrow Stripe GaAs/GaAlAs Double Heterostructure Lasers Grown by Metalorganic Chemical Vapor Deposition", Appl. Phys. Lett, 40(3), Feb. 1 1982, pp. 208-210.
C. S. Hong et al., "Controlled Zn Diffusion for Low Threshold Narrow Strip GaAlAs/GaAs DH Lasers", IEEE Electron Device Letters, vol. EDL-2, No. 9, Sep. 1981, pp. 225-227.
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H. Namizaki, "Transverse-Junstion-Stripe Lasers with A GaAs p-n Homojunction", IEEE Journal of Quantum Electronics, Jul. 1975, pp. 427-431.
H. Namizaki et al., "Transverse-Junction-Stripe-Geometry Double-Heterostructure Lasers with Very Low Threshold Current", Journal of Applied Physcis, vol. 45, No. 6, Jun. 1974, pp. 2785-2786.
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