Electricity: measuring and testing – Measuring – testing – or sensing electricity – per se – With rotor
Reexamination Certificate
2005-06-21
2005-06-21
Tokar, Michael (Department: 2829)
Electricity: measuring and testing
Measuring, testing, or sensing electricity, per se
With rotor
C324S765010
Reexamination Certificate
active
06909273
ABSTRACT:
A process for characterizing defects in semiconductors or insulators using a zero-bias thermally stimulated current technique wherein parasitic current is eliminated by the use of a novel ZBTSC apparatus that eliminates temperature gradient across a sample is described. The novel ZBTSC apparatus comprises a cold finger on a cyrostat. A sample holder is attached to the cold finger. A probe holder is attached to the cold finger. A probe is attached to the probe holder. A feedback temperature control keeps the probe and the cold finger at the same temperature. Alternatively, the sample holder may be attached to a first cold finger and the probe holder attached to a second cold finger. Feedback temperature controls for each cold finger are programed such that their temperatures are kept the same. The improved zero-bias thermally stimulated current technique of the invention comprises mounting a sample on the sample holder of the novel ZBTSC apparatus. The sample is excited at a first temperature to fill up defect traps with carriers and then heated to a second temperature higher than the first temperature wherein the heating is a linear function with respect to time. Defects are characterized by measuring current due to emission of the carriers from the defect traps as a function of temperature wherein the measuring is performed by the probe of the novel ZBTSC apparatus.
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W.S. Lau et al., “Detection of defect states responsible for leakage current in ultrathin tantalum pentoxide (Ta2O5) films by zero-bias thermally stimulated current spectroscopy,” App. Phys. Lett., vol. 71, No. 4, Jul. 28, 1997, pp. 500-502.
Chartered Semiconductor Manufacturing Ltd.
Patel Paresh
Pike Rosemary L.S.
Saile George O.
Tokar Michael
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