Zero dead-leg valve structure

Details Zero dead-leg valve structure Zero dead-leg valve structure

1996-12-31

1998-08-18

Hepperle, Stephen M.

Fluid handling

Systems

Multiple inlet with multiple outlet

137883, F16K 1120

Patent

active

057946590

ABSTRACT:
A valve structure without dead-legs is provided for controlling the flow of gases in a semiconductor fabrication facility. The valve structure comprises a conduit forming a loop with three ports. Flexible metallic diaphragms are selectively operable to open and close two of the ports.

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