Zero bird-beak oxide isolation scheme for integrated circuits

Details Zero bird-beak oxide isolation scheme for integrated circuits Zero bird-beak oxide isolation scheme for integrated circuits

1987-06-03

1988-10-04

Ozaki, George T.

Fishing, trapping, and vermin destroying

437 73, H01L 21467, H01L 21473

Patent

active

047756446

ABSTRACT:
The present method provides for formation of isolation oxide without "bird-beak" extensions thereof through the use of a nitride mask in contact with the surface of a semiconductor substrate on both sides of a patterned oxide layer, on which substrate the isolation oxide is grown.

REFERENCES:
patent: 3648125 (1972-03-01), Peltzer
patent: 3961999 (1976-06-01), Antipov
patent: 4118728 (1978-10-01), Berry
patent: 4271583 (1981-06-01), Kahng et al.
patent: 4272308 (1981-06-01), Varshney
patent: 4292156 (1981-09-01), Matsumoto et al.
patent: 4533429 (1985-08-01), Josquin
patent: 4561172 (1985-12-01), Slawinski et al.
patent: 4622096 (1986-11-01), Dil et al.

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