Z-θ table activated by two rotary motors

Details Z-θ table activated by two rotary motors Z-θ table activated by two rotary motors

2007-10-09

2007-10-09

Schuberg, Darren (Department: 2834)

Electrical generator or motor structure

Dynamoelectric

Linear

Reexamination Certificate

active

11490714

ABSTRACT:
A Z-θ table includes a bed capable of undergoing linear displacement along the Z-axis and angular positioning. The table includes two rotary motors arranged in a substantially concentric manner with two fixed stators. The interior rotor includes a device for guiding an intermediary piece along the Z-axis, and the exterior rotor includes a threaded portion that provides a nut associated with a threaded portion of an intermediary part arranged between the two rotors. The exterior rotor and the intermediary piece provide a ball-screw system. Each of the two rotors is associated with an angular displacement sensor for the precise determination of their angular positions.

REFERENCES:
patent: 6433447 (2002-08-01), Kitazawa et al.
patent: 6570282 (2003-05-01), Ito et al.
patent: 6700249 (2004-03-01), Botos

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