Z-stage configuration and application thereof

Details Z-stage configuration and application thereof Z-stage configuration and application thereof

2009-10-30

2011-10-04

Souw, Bernard E (Department: 2881)

Optics: measuring and testing

By light interference

For dimensional measurement

C356S482000, C356S493000, C356S399000, C356S028500, C218S121000, C218S121000, C700S280000

Reexamination Certificate

active

08031344

ABSTRACT:
A stage configuration is provided, wherein a ceramic plate is used as the z-stage body to decrease the use of the metal plates in the conventional configuration, so that the compact structure of the z-stage may decrease the vibrational movements of the z-stage. Further, two Laser interferometer are used to detect a movement of different points along a vertical line of the z-stage sidewall to calculate a movement of the specimen surface, so that a horizontal movement of the specimen surface can be detected more accurately.

REFERENCES:
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patent: 2005/0133485 (2005-06-01), Tokura
patent: 2009/0095086 (2009-04-01), Kessler et al.
patent: 2010/0014097 (2010-01-01), Sogard

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