Electrical generator or motor structure – Dynamoelectric – Linear
Reexamination Certificate
2005-02-28
2008-12-09
Nguyen, Tran (Department: 2834)
Electrical generator or motor structure
Dynamoelectric
Linear
Reexamination Certificate
active
07462958
ABSTRACT:
Methods and apparatus which are suitable for actuating a stage relative to a z-axis and supporting the weight of the stage against the force of gravity are disclosed. According to one aspect of the present invention, an actuator device includes a first arrangement, a magnetic system, a piston, and a guide bearing arrangement. The first arrangement includes a yoke and a center pole, and the magnetic system includes a magnet that is coupled to the yoke as well as a coil which cooperate to function as a voice coil motor. The piston supports at least a weight associated with the first arrangement, and the guide bearing arrangement includes a planar air bearing that enables the device to move over an external surface.
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Nguyen Tran
Nikon Corporation
Technology & Innovation Law
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