Yttrium oxide material, member for...

Details Yttrium oxide material, member for... Yttrium oxide material, member for...

2011-03-29

2011-03-29

Group, Karl E (Department: 1731)

Compositions: ceramic

Ceramic compositions

Yttrium, lanthanide, actinide, or transactinide containing

C501S103000

Reexamination Certificate

active

07915189

ABSTRACT:
An electrostatic chuck that is a member for a semiconductor-manufacturing apparatus contains an yttrium oxide material containing first inorganic particles and second inorganic particles. The first inorganic particles form solid solutions in yttrium oxide, can be precipitated from yttrium oxide, and are present in grains of yttrium oxide. The second inorganic particles can form solid solutions in the first inorganic particles, are unlikely to form any solid solution in yttrium oxide, and are present at boundaries between the yttrium oxide grains. The first inorganic particles contain at least one of ZrO2and HfO2. The second inorganic particles contain at least one selected from the group consisting of MgO, CaO, SrO, and BaO. The yttrium oxide material is produced in such a manner that solid solution particles are prepared by mixing and firing the first and second inorganic particles and are mixed with yttrium oxide and the mixture is fired.

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